Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8143557 | Plane heater | Kazuo Shibata, Hiroo Kawasaki, Manabu Amikura | 2012-03-27 |
| 7931749 | Shower head and film-forming device using the same | Manabu Amikura | 2011-04-26 |
| 7887873 | Gasification monitor, method for detecting mist, film forming method and film forming apparatus | — | 2011-02-15 |
| 7718930 | Loading table and heat treating apparatus having the loading table | Hiroo Kawasaki, Manabu Amikura | 2010-05-18 |
| 7238238 | Gasification monitor, method for detecting mist, film forming method and film forming apparatus | — | 2007-07-03 |
| 6719272 | Valve and vacuum processing device with the valve | — | 2004-04-13 |
| 6669784 | Gas processing apparatus for object to be processed | Munehisa Futamura | 2003-12-30 |
| 6436193 | Gas processing apparatus baffle member, and gas processing method | Shigeru Kasai, Taro Komiya, Tomihiro Yonenaga | 2002-08-20 |
| 6372048 | Gas processing apparatus for object to be processed | Munehisa Futamura | 2002-04-16 |
| 6253029 | Vacuum processing apparatus | Kazuichi Hayashi | 2001-06-26 |
| 6149729 | Film forming apparatus and method | Kazuichi Hayashi, Yuichiro Fujikawa, Takashi Horiuchi | 2000-11-21 |
| 5879139 | Vacuum pump with gas heating | Kazuichi Hayashi | 1999-03-09 |
| 5783492 | Plasma processing method, plasma processing apparatus, and plasma generating apparatus | Kimihiro Higuchi, Chishio Koshimizu, Ryoichiro Koshi, Nobuo Ishii | 1998-07-21 |
| 5753891 | Treatment apparatus | Kenji Nebuka, Mitsuaki Komino | 1998-05-19 |
| 5727634 | Fire detecting/extinguishing apparatus and water discharging nozzle therefor | Hiroshi Ishida, Akira Asoma, Shuji Matsumoto, Hiroyuki Shibuya, Suguru Shimokawa +3 more | 1998-03-17 |
| 5455082 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Nobuo Ishii, Towl Ikeda, Hiroaki Saeki | 1995-10-03 |
| 5433780 | Vacuum processing apparatus and exhaust system that prevents particle contamination | Towl Ikeda | 1995-07-18 |
| 5426865 | Vacuum creating method and apparatus | Towl Ikeda | 1995-06-27 |
| 5392990 | Firefighting double-nozzle deluge gun and control method thereof | Toshihide Tsuji, Shuji Matsumoto, Katsuaki Tonomura | 1995-02-28 |
| 5382311 | Stage having electrostatic chuck and plasma processing apparatus using same | Kenji Ishikawa, Mitsuaki Komino, Tadashi Mitui, Izumi Arai, Yoshifumi Tahara | 1995-01-17 |
| 5314541 | Reduced pressure processing system and reduced pressure processing method | Masasi Saito, Nobuo Ishii, Towl Ikeda, Hiroaki Saeki | 1994-05-24 |
| 5240556 | Surface-heating apparatus and surface-treating method | Yoshio Ishikawa, Junichi Arami, Towl Ikeda | 1993-08-31 |
| 5198755 | Probe apparatus | Towl Ikeda, Issei Imahashi | 1993-03-30 |
| 5133561 | Sealing device | Hisashi Hattori, Hiroshi Sekizuka, Yoichi Kawauchi, Hisao Fujisawa | 1992-07-28 |