Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5382311 | Stage having electrostatic chuck and plasma processing apparatus using same | Kenji Ishikawa, Mitsuaki Komino, Teruo Iwata, Izumi Arai, Yoshifumi Tahara | 1995-01-17 |