Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679879 | Substrate processing apparatus | Soo Hyun Kim, Dae Youn Kim | 2020-06-09 |
| 10403523 | Substrate processing apparatus | Soo Hyun Kim, Dae Youn Kim | 2019-09-03 |
| 9753536 | Electronic device | Ryosuke Kobayashi | 2017-09-05 |
| 9640416 | Single-and dual-chamber module-attachable wafer-handling chamber | — | 2017-05-02 |
| 9349620 | Apparatus and method for pre-baking substrate upstream of process chamber | Keisuke Kamata, Hiroyuki Sato, Kazunori Furukawahara, Masaei Suwada, Kenkichi Okubo | 2016-05-24 |
| 9343350 | Anti-slip end effector for transporting workpiece using van der waals force | — | 2016-05-17 |
| 9340640 | Polyol for polyurethane preparation and polyurethane preparation method using same | Tomohisa Hirano, Koji Kabu | 2016-05-17 |
| 8422214 | Mobile electronic apparatus | Koichiro Furumatsu, Takaaki Watanabe | 2013-04-16 |
| 8115234 | Semiconductor device | Akishige Nakajima, Yasushi Shigeno, Hitoshi Akamine, Tsutomu Kobori, Kazuto Tajima +2 more | 2012-02-14 |
| 8083856 | Ultrasonic cleaning apparatus and ultrasonic cleaning method | Tatsuo Abe, Hitoshi Kabasawa | 2011-12-27 |
| 6330391 | VTR signal processing circuit | Takashi Kurihara, Yoshihisa Ichikawa, Naoki Kurabayashi, Hiroshi Kuramoto, Tsuyoshi Muroya | 2001-12-11 |
| 6110287 | Plasma processing method and plasma processing apparatus | Yoshifumi Tahara, Hiroshi Nishikawa, Yoshinobu MITANO, Shunichi Iimuro, Kazuo Fukasawa +2 more | 2000-08-29 |
| 5858258 | Plasma processing method | Hiroshi Kojima, Yoshifumi Tahara | 1999-01-12 |
| 5382311 | Stage having electrostatic chuck and plasma processing apparatus using same | Kenji Ishikawa, Mitsuaki Komino, Tadashi Mitui, Teruo Iwata, Yoshifumi Tahara | 1995-01-17 |
| 5203958 | Processing method and apparatus | Yoshifumi Tahara | 1993-04-20 |
| 5164034 | Apparatus and method for processing substrate | Yoshifumi Tahara, Yoshio Ishikawa | 1992-11-17 |
| 5155331 | Method for cooling a plasma electrode system for an etching apparatus | Takao Horiuchi, Yoshifumi Tahara | 1992-10-13 |
| 5144800 | Exhaust manifold system for a transverse v-type engine | Yoshiaki Shioya, Toshiro Shimamoto, Susumu Kawamoto | 1992-09-08 |
| 5089083 | Plasma etching method | Hiroshi Kojima, Yoshifumi Tahara | 1992-02-18 |
| 4978412 | Plasma processing device | Makoto Aoki, Yoshifumi Tahara | 1990-12-18 |
| 4963713 | Cooling of a plasma electrode system for an etching apparatus | Takao Horiuchi, Yoshifumi Tahara | 1990-10-16 |
| 4931135 | Etching method and etching apparatus | Takao Horiuchi, Yoshifumi Tahara | 1990-06-05 |