Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11247330 | Method for teaching a transportation position and alignment jig | Hideki Yoshida | 2022-02-15 |
| 10403514 | Substrate transporting system, storage medium and substrate transporting method | Takashi Hagino | 2019-09-03 |
| 9793148 | Method for positioning wafers in multiple wafer transport | Takayuki Yamagishi, Hiroyuki Tanaka | 2017-10-17 |
| 9349620 | Apparatus and method for pre-baking substrate upstream of process chamber | Keisuke Kamata, Hiroyuki Sato, Kazunori Furukawahara, Kenkichi Okubo, Izumi Arai | 2016-05-24 |
| 8758514 | Cluster type semiconductor processing apparatus | Masahiro Takizawa, Takashi Hagino | 2014-06-24 |
| 8041450 | Position sensor system for substrate transfer robot | Masahiro Takizawa | 2011-10-18 |
| 7963736 | Wafer processing apparatus with wafer alignment device | Masahiro Takizawa, Masayuki Akagawa | 2011-06-21 |
| 7618226 | Semiconductor substrate transfer apparatus and semiconductor substrate processing apparatus equipped with the same | Masahiro Takizawa, Takashi Wada | 2009-11-17 |
| 7021881 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Takayuki Yamagishi, Takeshi Watanabe | 2006-04-04 |
| 6945746 | Semiconductor manufacturing equipment and maintenance method | Takayuki Yamagishi, Takeshi Watanabe | 2005-09-20 |
| 6899507 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Takayuki Yamagishi, Takeshi Watanabe | 2005-05-31 |
| 6662817 | Gas-line system for semiconductor-manufacturing apparatus | Takayuki Yamagishi | 2003-12-16 |
| 6630053 | Semiconductor processing module and apparatus | Takayuki Yamagishi, Takeshi Watanabe | 2003-10-07 |
| 6305898 | Wafer transfer mechanism | Takayuki Yamagishi, Kazunori Furukawara | 2001-10-23 |