Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7963736 | Wafer processing apparatus with wafer alignment device | Masahiro Takizawa, Masaei Suwada | 2011-06-21 |
| 6762412 | Optical apparatus, exposure apparatus using the same, and gas introduction method | Taichi Taniuchi | 2004-07-13 |
| 6671033 | Optical device, method of cleaning the same, projection aligner, and method of producing the same | Osamu Yamashita, Taichi Taniuchi | 2003-12-30 |
| 6288769 | Optical device method of cleaning the same, projection aligner, and method of producing the same | Osamu Yamashita, Taichi Taniuchi | 2001-09-11 |
| 5888327 | Pellicle pasting system and method | Yoshihiro Kimura | 1999-03-30 |
| 4856904 | Wafer inspecting apparatus | — | 1989-08-15 |