Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349620 | Apparatus and method for pre-baking substrate upstream of process chamber | Keisuke Kamata, Hiroyuki Sato, Masaei Suwada, Kenkichi Okubo, Izumi Arai | 2016-05-24 |
| 7833353 | Liquid material vaporization apparatus for semiconductor processing apparatus | Hideaki Fukuda | 2010-11-16 |
| 7712370 | Method of detecting occurrence of sticking of substrate | Katsutoshi Ishigami | 2010-05-11 |