Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387948 | System for processing substrate and maintenance method thereof | Tomohiro Abe | 2025-08-12 |
| 12183603 | Processing module and processing method | Kiyoshi Mori | 2024-12-31 |
| 11996306 | Coupled processing containers, substrate processing system, and substrate processing method | — | 2024-05-28 |
| 10867819 | Vacuum processing apparatus, vacuum processing system and vacuum processing method | Tamihiro Kobayashi | 2020-12-15 |
| 10707106 | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules | Yukihiro Mori | 2020-07-07 |
| 10630135 | Electric power tool | Hitoshi Sengiku, Hideyuki Goto | 2020-04-21 |
| 10364496 | Dual section module having shared and unshared mass flow controllers | — | 2019-07-30 |
| 9885112 | Film forming apparatus | Naoto Tsuji, Kazuo Sato | 2018-02-06 |
| 9793148 | Method for positioning wafers in multiple wafer transport | Masaei Suwada, Hiroyuki Tanaka | 2017-10-17 |
| 9370863 | Anti-slip end-effector for transporting workpiece | Naoto Tsuji | 2016-06-21 |
| 9312155 | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules | Yukihiro Mori | 2016-04-12 |
| D753269 | Top plate | Kazuo Sato, Naoto Tsuji | 2016-04-05 |
| D743513 | Seal ring | Naoto Tsuji, Kazuo Sato | 2015-11-17 |
| D735836 | Shower plate | Naoto Tsuji, Kazuo Sato | 2015-08-04 |
| D733843 | Shower plate | Kazuo Sato, Naoto Tsuji | 2015-07-07 |
| D733261 | Top plate | Kazuo Sato, Naoto Tsuji | 2015-06-30 |
| D732644 | Top plate | Kazuo Sato, Naoto Tsuji | 2015-06-23 |
| D732145 | Shower plate | Naoto Tsuji, Kazuo Sato | 2015-06-16 |
| D726884 | Heater block | Kazuo Sato, Naoto Tsuji | 2015-04-14 |
| D725168 | Heater block | Naoto Tsuji, Kazuo Sato | 2015-03-24 |
| D724701 | Shower plate | Kazuo Sato, Naoto Tsuji | 2015-03-17 |
| D720838 | Shower plate | Kazuo Sato, Naoto Tsuji | 2015-01-06 |
| 7690881 | Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus | Tamihiro Kobayashi, Akira Watanabe, Kunihiro Kaneuchi | 2010-04-06 |
| 7638003 | Semiconductor processing apparatus with lift pin structure | Kiyoshi Satoh | 2009-12-29 |
| 7520244 | Plasma treatment apparatus | Hiroki Arai, Kiyoshi Satoh | 2009-04-21 |