Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12431334 | Gas distribution assembly | Yukihiro Mori, Vincent Hubert Bernard Gilles Babin | 2025-09-30 |
| 11339476 | Substrate processing device having connection plates, substrate processing method | Ippei Yanagisawa, Miho Shimotori, Makoto Igarashi | 2022-05-24 |
| 11199247 | Winding transmission body tension device | Hideaki Seki | 2021-12-14 |
| 11118262 | Substrate processing apparatus having a gas-mixing manifold | Masaki Hirayama | 2021-09-14 |
| 10844484 | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods | Lucian Jdira, Herbert Terhorst, Yoshio Susa | 2020-11-24 |
| 10435789 | Substrate treatment apparatus | Takuya Suguri, Yozo Ikedo | 2019-10-08 |
| 9963782 | Semiconductor manufacturing apparatus | — | 2018-05-08 |
| 9885112 | Film forming apparatus | Kazuo Sato, Takayuki Yamagishi | 2018-02-06 |
| 9370863 | Anti-slip end-effector for transporting workpiece | Takayuki Yamagishi | 2016-06-21 |
| D753269 | Top plate | Takayuki Yamagishi, Kazuo Sato | 2016-04-05 |
| D743513 | Seal ring | Takayuki Yamagishi, Kazuo Sato | 2015-11-17 |
| D735836 | Shower plate | Takayuki Yamagishi, Kazuo Sato | 2015-08-04 |
| D733843 | Shower plate | Takayuki Yamagishi, Kazuo Sato | 2015-07-07 |
| D733261 | Top plate | Takayuki Yamagishi, Kazuo Sato | 2015-06-30 |
| D732644 | Top plate | Takayuki Yamagishi, Kazuo Sato | 2015-06-23 |
| D732145 | Shower plate | Takayuki Yamagishi, Kazuo Sato | 2015-06-16 |
| 9018093 | Method for forming layer constituted by repeated stacked layers | Fumitaka Shoji | 2015-04-28 |
| D726884 | Heater block | Takayuki Yamagishi, Kazuo Sato | 2015-04-14 |
| D725168 | Heater block | Takayuki Yamagishi, Kazuo Sato | 2015-03-24 |
| D724701 | Shower plate | Takayuki Yamagishi, Kazuo Sato | 2015-03-17 |
| D720838 | Shower plate | Takayuki Yamagishi, Kazuo Sato | 2015-01-06 |
| 8912101 | Method for forming Si-containing film using two precursors by ALD | Atsuki Fukazawa, Noboru Takamure, Suvi Haukka, Antti Niskanen, Hyung Sang Park | 2014-12-16 |
| 7955650 | Method for forming dielectric film using porogen gas | — | 2011-06-07 |
| 7807566 | Method for forming dielectric SiOCH film having chemical stability | Kiyohiro Matsushita, Manabu Kato, Noboru Takamure | 2010-10-05 |
| 7799134 | Shower plate having projections and plasma CVD apparatus using same | Hideaki Fukuda, Hiroki Arai, Yoshinori Morisada, Tamihiro Kobayashi | 2010-09-21 |