Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tsuyoshi Moriya, Tadahiro Ishizaka | 2024-08-13 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Makoto Sekine, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka | 2024-05-28 |
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Kippei Sugita, Tatsuya Yamaguchi, Makoto Fujikawa | 2017-07-18 |
| 9422452 | Polymerized film forming method | Tatsuya Yamaguchi | 2016-08-23 |
| 7799134 | Shower plate having projections and plasma CVD apparatus using same | Naoto Tsuji, Hideaki Fukuda, Hiroki Arai, Tamihiro Kobayashi | 2010-09-21 |
| 7638441 | Method of forming a carbon polymer film using plasma CVD | Nobuo Matsuki, Kamal Kishore Goundar | 2009-12-29 |
| 7504344 | Method of forming a carbon polymer film using plasma CVD | Nobuo Matsuki, Seijiro Umemoto, Jea Sik Lee | 2009-03-17 |
| 7470633 | Method of forming a carbon polymer film using plasma CVD | Nobuo Matsuki, Seijiro Umemoto, Jea Sik Lee | 2008-12-30 |
| 7410915 | Method of forming carbon polymer film using plasma CVD | Kamal Kishore Goundar, Masashi Yamaguchi, Nobuo Matsuki, Kyu-Tae Na, Eun-Kyung Baek | 2008-08-12 |
| 7381291 | Dual-chamber plasma processing apparatus | Yasuhiro Tobe, Shingo Ikeda, Baiei Kawano | 2008-06-03 |
| 7064088 | Method for forming low-k hard film | Yasuyoshi Hyodo, Atsuki Fukazawa, Masashi Yamaguchi, Nobuo Matsuki | 2006-06-20 |
| 6881683 | Insulation film on semiconductor substrate and method for forming same | Nobuo Matsuki, Yasuyoshi Hyodo, Masashi Yamaguchi, Atsuki Fukazawa, Manabu Kato +3 more | 2005-04-19 |
| 6852650 | Insulation film on semiconductor substrate and method for forming same | Nobuo Matsuki, Yasuyoshi Hyodo, Masashi Yamaguchi, Atsuki Fukazawa, Manabu Kato | 2005-02-08 |
| 6784123 | Insulation film on semiconductor substrate and method for forming same | Nobuo Matsuki, Yasuyoshi Hyodo, Seijiro Umemoto | 2004-08-31 |
| 6759344 | Method for forming low dielectric constant interlayer insulation film | Nobuo Matsuki, Atsuki Fukazawa, Manabu Kato | 2004-07-06 |
| 6740367 | Plasma CVD film-forming device | Nobuo Matsuki | 2004-05-25 |
| 6631692 | Plasma CVD film-forming device | Nobuo Matsuki | 2003-10-14 |
| 6559520 | Siloxan polymer film on semiconductor substrate | Nobuo Matsuki, Lee Jea Sik, Satoshi Takahashi | 2003-05-06 |
| 6514880 | Siloxan polymer film on semiconductor substrate and method for forming same | Nobuo Matsuki, Lee Jea Sik, Satoshi Takahashi | 2003-02-04 |
| 6383955 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | Nobuo Matsuki, Yuichi Naito, Aya Matsunoshita | 2002-05-07 |
| 6352945 | Silicone polymer insulation film on semiconductor substrate and method for forming the film | Nobuo Matsuki, Yuichi Naito, Aya Matsunoshita | 2002-03-05 |