Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840069 | Plasma processing apparatus and plasma control method | Jun Hirose | 2020-11-17 |
| 10804082 | Substrate processing apparatus, and operation method for substrate processing apparatus | — | 2020-10-13 |
| 10651071 | Substrate processing apparatus and substrate removing method | — | 2020-05-12 |
| 8522958 | Vacuum processing apparatus | Satoru Kawakami, Shinji Matsubayashi, Yosuke Muraguchi, Yasuyoshi Kitazawa, Yasumichi Mieno | 2013-09-03 |
| 8337621 | Substrate processing apparatus | Satoru Kawakami, Shinji Matsubayashi | 2012-12-25 |
| 8262844 | Plasma processing apparatus, plasma processing method and storage medium | Hiraku Ishikawa | 2012-09-11 |
| 7381291 | Dual-chamber plasma processing apparatus | Yoshinori Morisada, Shingo Ikeda, Baiei Kawano | 2008-06-03 |