Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159600 | Wafer transport apparatus | Takumi Mizokawa | 2015-10-13 |
| 8522958 | Vacuum processing apparatus | Yasuhiro Tobe, Satoru Kawakami, Shinji Matsubayashi, Yosuke Muraguchi, Yasumichi Mieno | 2013-09-03 |
| 6914233 | Wafer mapping system | Shigeto Suzuki, Toshio Miki, Susumu Nakagawa, Katsumi Yasuda, Kazunari Kitaji | 2005-07-05 |