Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8177048 | Vacuum processing apparatus | Yushi Sato, Toshio Miki, Yosuke Muraguchi, Katsumi Yasuda, Yasushi Muragishi +1 more | 2012-05-15 |
| 6914233 | Wafer mapping system | Yasuyoshi Kitazawa, Shigeto Suzuki, Toshio Miki, Susumu Nakagawa, Katsumi Yasuda | 2005-07-05 |