Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7408225 | Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms | Hiroshi Shinriki, Akira Shimizu | 2008-08-05 |
| 7381291 | Dual-chamber plasma processing apparatus | Yasuhiro Tobe, Yoshinori Morisada, Shingo Ikeda | 2008-06-03 |
| 7276123 | Semiconductor-processing apparatus provided with susceptor and placing block | Akira Shimizu, Hideaki Fukuda, Hiroki Arai, Takayuki Yamagishi | 2007-10-02 |
| 7267725 | Thin-film deposition apparatus | — | 2007-09-11 |
| 6921556 | Method of film deposition using single-wafer-processing type CVD | Akira Shimizu, Hideaki Fukuda, Kazuo Sato | 2005-07-26 |