Issued Patents All Time
Showing 1–25 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8133555 | Method for forming metal film by ALD using beta-diketone metal complex | Kunitoshi Namba, Daekyun Jeong | 2012-03-13 |
| 8084104 | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition | Kunitoshi Namba, Daekyun Jeong | 2011-12-27 |
| 7799674 | Ruthenium alloy film for copper interconnects | Hiroaki Inoue | 2010-09-21 |
| 7785658 | Method for forming metal wiring structure | Akira Shimizu | 2010-08-31 |
| 7655564 | Method for forming Ta-Ru liner layer for Cu wiring | Daekyun Jeong | 2010-02-02 |
| 7497964 | Plasma igniting method and substrate processing method | Masanobu Igeta, Kazuyoshi Yamazaki, Shintaro Aoyama | 2009-03-03 |
| 7481902 | Substrate processing apparatus and method, high speed rotary valve and cleaning method | Junichi Arami | 2009-01-27 |
| 7435484 | Ruthenium thin film-formed structure | Hiroaki Inoue | 2008-10-14 |
| 7408225 | Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms | Baiei Kawano, Akira Shimizu | 2008-08-05 |
| 7383841 | Method of cleaning substrate-processing device and substrate-processing device | Kazuya Dobashi, Mikio Suzuki, Takashi Magara | 2008-06-10 |
| 7378358 | Method for forming insulating film on substrate, method for manufacturing semiconductor device and substrate-processing apparatus | Masanobu Igeta, Shintaro Aoyama | 2008-05-27 |
| 7354622 | Method for forming thin film and apparatus for forming thin film | Kenji Matsumoto, Toru Tatsumi | 2008-04-08 |
| 7273526 | Thin-film deposition apparatus | Junichi Arami | 2007-09-25 |
| 7129185 | Substrate processing method and a computer readable storage medium storing a program for controlling same | Shintaro Aoyama, Masanobu Igeta | 2006-10-31 |
| 7125799 | Method and device for processing substrate, and apparatus for manufacturing semiconductor device | Shintaro Aoyama, Masanobu Igeta, Tsuyoshi Takahashi | 2006-10-24 |
| 7105362 | Method of forming dielectric film | Tsuyoshi Takahashi, Kazumi Kubo | 2006-09-12 |
| 7105101 | Method of removing oxide film on a substrate with hydrogen and fluorine radicals | Shintaro Aoyama | 2006-09-12 |
| 7037560 | Film forming method, and film modifying method | Masahito Sugiura | 2006-05-02 |
| 6953731 | Fabrication process of a semiconductor device | Kazumi Kubo | 2005-10-11 |
| 6927112 | Radical processing of a sub-nanometer insulation film | Masanobu Igeta, Shintaro Aoyama, Tsuyoshi Takahashi | 2005-08-09 |
| 6866882 | Method of forming a thin film | Kenji Matsumoto | 2005-03-15 |
| 6866890 | Method of forming a dielectric film | Hideki Kiryu, Shintaro Aoyama, Tsuyoshi Takahashi | 2005-03-15 |
| 6806211 | Device and method for processing substrate | Koji Homma | 2004-10-19 |
| 6800139 | Film deposition apparatus and method | Kenji Matsumoto | 2004-10-05 |
| 6756235 | Metal oxide film formation method and apparatus | Yijun Liu, Takashi Magara | 2004-06-29 |