Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12018375 | Flim forming method of carbon-containing film by microwave plasma | Ryota IFUKU, Takashi Matsumoto, Makoto Wada | 2024-06-25 |
| 12014907 | Method and device for forming graphene structure | Ryota IFUKU, Takashi Matsumoto | 2024-06-18 |
| 11972929 | Processing apparatus and film forming method | Makoto Wada, Takashi Matsumoto, Ryota IFUKU, Hirokazu Ueda | 2024-04-30 |
| 11302576 | Method of making a semiconductor device including a graphene barrier layer between conductive layers | Makoto Wada, Takashi Matsumoto, Ryota IFUKU | 2022-04-12 |
| 10041174 | Method for forming carbon nanotubes and carbon nanotube film forming apparatus | Takashi Matsumoto, Kenjiro Koizumi, Yusaku Kashiwagi | 2018-08-07 |
| 9662705 | Processing machine and bending method | Hidemasa Otsubo, Masafumi Torimoto, Kazuhiro Mitsukawa, Takao Ikeda | 2017-05-30 |
| 9059178 | Method for forming carbon nanotubes and carbon nanotube film forming apparatus | Takashi Matsumoto, Kenjiro Koizumi, Yusaku Kashiwagi | 2015-06-16 |
| 8168539 | Method for forming tungsten film at a surface of a processing target material, film-forming apparatus, storage medium and semiconductor device with a tungsten film | Yasutaka Mizoguchi, Yasushi Aiba | 2012-05-01 |
| 7078341 | Method of depositing metal layers from metal-carbonyl precursors | Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Yumiko Kawano +3 more | 2006-07-18 |
| 7037560 | Film forming method, and film modifying method | Hiroshi Shinriki | 2006-05-02 |
| 7030028 | Etching method | Takuya Mori, Koichiro Inazawa, Noriyuki Kobayashi, Yoshihiro Hayashi, Keizo Kinoshita | 2006-04-18 |
| 6989321 | Low-pressure deposition of metal layers from metal-carbonyl precursors | Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Yumiko Kawano +3 more | 2006-01-24 |
| 6890848 | Fabrication process of a semiconductor device | Kaoru Maekawa, Satohiko Hoshino, Federica Allegretti | 2005-05-10 |
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Mitsuaki Iwashita, Hiroki Ohno, Shigeru Kawamura | 2004-10-05 |
| 6467491 | Processing apparatus and processing method | Hiroshi Shinriki, Hideki Kiryu, Shintaro Aoyama | 2002-10-22 |
| 6428850 | Single-substrate-processing CVD method of forming film containing metal element | Hiroshi Shinriki, Yijun Liu | 2002-08-06 |
| 6232248 | Single-substrate-heat-processing method for performing reformation and crystallization | Hiroshi Shinriki | 2001-05-15 |
| 6143081 | Film forming apparatus and method, and film modifying apparatus and method | Hiroshi Shinriki | 2000-11-07 |
| 6126753 | Single-substrate-processing CVD apparatus and method | Hiroshi Shinriki, Yijun Liu | 2000-10-03 |
| 5755963 | Filter element and fabrication method for the same | Toshihiko MURASE, Yoshihisa Sanami, Toshihiro Takahara, Atushi Kosaka, Takeharu Maekawa +1 more | 1998-05-26 |