Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11041239 | Film forming method for SiC film | Taiki Katou, Shuji AZUMO | 2021-06-22 |
| 10833166 | Semiconductor device including an MIS structure | Kenji Yamamoto, Masatoshi AKETA, Hirokazu Asahara, Takashi Nakamura, Takuji Hosoi +3 more | 2020-11-10 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Yumiko Kawano, Shuji AZUMO, Hiroki Murakami, Michitaka Aita, Tadahiro Ishizaka +2 more | 2019-11-26 |
| 10453681 | Method of selective vertical growth of a dielectric material on a dielectric substrate | Kandabara Tapily, Takashi Matsumoto, Gerrit J. Leusink | 2019-10-22 |
| 10041174 | Method for forming carbon nanotubes and carbon nanotube film forming apparatus | Takashi Matsumoto, Masahito Sugiura, Kenjiro Koizumi | 2018-08-07 |
| 9293543 | Film forming method and film forming apparatus | Shuji AZUMO, Yuichiro Morozumi, Yu Wamura, Katsushige Harada, Kosuke Takahashi +3 more | 2016-03-22 |
| 9219008 | Graphene patterning method and patterning member | Takashi Matsumoto | 2015-12-22 |
| 9059178 | Method for forming carbon nanotubes and carbon nanotube film forming apparatus | Takashi Matsumoto, Masahito Sugiura, Kenjiro Koizumi | 2015-06-16 |
| 8691338 | Polymerized film forming method and polymerized film forming apparatus | Yumiko Kawano | 2014-04-08 |
| 8378464 | Method for manufacturing semiconductor device, semiconductor device, semiconductor manufacturing apparatus and storage medium | Yoshihiro Kato, Takashi Matsumoto | 2013-02-19 |
| 7867922 | Film forming method for dielectric film | Shinji Ide, Yasuhiro Oshima | 2011-01-11 |
| 7662728 | Substrate processing method | Yasuhiro Oshima, Yoshihisa Kagawa, Gishi Chung | 2010-02-16 |
| 7645481 | Fabrication of low dielectric constant insulating film | Masaru Sasaki, Satohiko Hoshino, Shinji Ide | 2010-01-12 |
| 7601402 | Method for forming insulation film and apparatus for forming insulation film | Yoshihisa Kagawa, Kohei Kawamura, Gishi Chung | 2009-10-13 |