Issued Patents All Time
Showing 1–25 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387926 | Selective film formation using self-assembled monolayer | Zeyuan NI, Shuji AZUMO, Taiki KATO, Shinichi Ike | 2025-08-12 |
| 12341004 | Film formation method and film formation apparatus | Shuji AZUMO, Shinichi Ike | 2025-06-24 |
| 12183572 | Film formation method and film formation device | Shuji AZUMO, Shinichi Ike | 2024-12-31 |
| 12152304 | Film forming method for forming self-assembled monolayer on substrate | Shuji AZUMO, Shinichi Ike | 2024-11-26 |
| 11869927 | Method of manufacturing semiconductor device | Genji Nakamura, Philippe Gaubert, Hajime NAKABAYASHI | 2024-01-09 |
| 11830741 | Method for forming film | Shinichi Ike, Shuji AZUMO, Hiroki Murakami | 2023-11-28 |
| 11788185 | Film formation method and film formation device | Shuji AZUMO, Shinichi Ike | 2023-10-17 |
| 11598001 | Film forming method | Shuji AZUMO, Shinichi Ike | 2023-03-07 |
| 10490443 | Selective film forming method and method of manufacturing semiconductor device | Shuji AZUMO, Hiroki Murakami, Michitaka Aita, Tadahiro Ishizaka, Koji Akiyama +2 more | 2019-11-26 |
| 9750087 | Heat treatment apparatus | Tomihiro Yonenaga | 2017-08-29 |
| 9428835 | Cobalt base film-forming method, cobalt base film-forming material, and novel compound | Hideaki Machida, Masato Ishikawa, Hiroshi Sudoh, Kazutoshi Iwai | 2016-08-30 |
| 9246098 | Ge—Sb—Te film forming method, Ge—Te film forming method, and Sb—Te film forming method | Susumu Arima | 2016-01-26 |
| 9187822 | Method for forming Ge-Sb-Te film and storage medium | Susumu Arima | 2015-11-17 |
| 8927060 | Method for forming Ge-Sb-Te film and storage medium | Susumu Arima | 2015-01-06 |
| 8691338 | Polymerized film forming method and polymerized film forming apparatus | Yusaku Kashiwagi | 2014-04-08 |
| 8679913 | Method for Sr—Ti—O-based film formation | Susumu Arima, Akinobu Kakimoto, Toshiyuki Hirota, Takakazu Kiyomura | 2014-03-25 |
| 8674273 | Heat treatment apparatus | Tomihiro Yonenaga | 2014-03-18 |
| 8658951 | Heat treatment apparatus | Tomihiro Yonenaga | 2014-02-25 |
| 8372688 | Method for forming Ge-Sb-Te film and storage medium | Susumu Arima | 2013-02-12 |
| 8361550 | Method for forming SrTiO3 film and storage medium | Akinobu Kakimoto | 2013-01-29 |
| 8293327 | Process for forming the strontium-containing thin film | Hidekimi Kadokura, Shintaro Higashi, Yoshinori Kuboshima | 2012-10-23 |
| 8029621 | Raw material feeding device, film formation system and method for feeding gaseous raw material | Hideaki Yamasaki | 2011-10-04 |
| 7960278 | Method of film deposition | Hideaki Yamasaki | 2011-06-14 |
| 7816282 | Method for forming SrTiO3 film | Akinobu Kakimoto, Hidekimi Kadokura, Shintaro Higashi | 2010-10-19 |
| 7582544 | ALD film forming method | Isao Gunji | 2009-09-01 |