Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387926 | Selective film formation using self-assembled monolayer | Zeyuan NI, Yumiko Kawano, Shuji AZUMO, Taiki KATO | 2025-08-12 |
| 12341004 | Film formation method and film formation apparatus | Yumiko Kawano, Shuji AZUMO | 2025-06-24 |
| 12183572 | Film formation method and film formation device | Yumiko Kawano, Shuji AZUMO | 2024-12-31 |
| 12152304 | Film forming method for forming self-assembled monolayer on substrate | Shuji AZUMO, Yumiko Kawano | 2024-11-26 |
| 11830741 | Method for forming film | Shuji AZUMO, Yumiko Kawano, Hiroki Murakami | 2023-11-28 |
| 11788185 | Film formation method and film formation device | Shuji AZUMO, Yumiko Kawano | 2023-10-17 |
| 11598001 | Film forming method | Shuji AZUMO, Yumiko Kawano | 2023-03-07 |
| 11417514 | Film forming method and film forming apparatus | Yuichiro WAGATSUMA, Toyohiro KAMADA, Shuji AZUMO | 2022-08-16 |
| 10490518 | Measuring device | — | 2019-11-26 |
| 10113892 | Measuring apparatus and method of manufacturing the measuring apparatus | — | 2018-10-30 |
| 8166814 | Flow sensor and manufacturing method therefor | Hiroshi Hatakeyama, Satoshi Tsuchiya | 2012-05-01 |
| D654385 | Flow sensor | — | 2012-02-21 |
| 7765865 | Flow sensor unit including an insulating member interposed between the sensor chip and the attachment plate | Shoji Kamiunten, Junji Kumasa | 2010-08-03 |
| 7383726 | Package structure of sensor and flow sensor having the same | Nobuhiko Zushi, Takeshi Nishi | 2008-06-10 |
| 7185539 | Flow sensor | Nobuhiko Zushi | 2007-03-06 |
| 7117736 | Flow sensor | Shoji Kamiunten, Yoshiyuki Ishikura, Seiichiro Kinugasa, Hideyuki Tanaka | 2006-10-10 |
| 6981410 | Flow sensor and method of manufacturing the same | Koji Seki, Nobuhiko Zushi, Seishi Nakano, Tarou Nakata, Shoji Kamiunten | 2006-01-03 |