Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347676 | Substrate processing method and substrate processing system | Masahisa Watanabe, Mayuko NAKAMURA, Takashi Sakuma, Osamu Yokoyama, Kwangpyo Choi | 2025-07-01 |
| 11915964 | Substrate processing apparatus and stage | Masahisa Watanabe, Mayuko NAKAMURA | 2024-02-27 |
| 11664266 | Substrate processing apparatus and substrate delivery method | Kentaro Asakura, Tetsuya Saitou, Masahisa Watanabe | 2023-05-30 |
| 11476132 | Sealing structure, vacuum processing apparatus and sealing method | Hachishiro Iizuka, Masahisa Watanabe | 2022-10-18 |
| 11417514 | Film forming method and film forming apparatus | Toyohiro KAMADA, Shinichi Ike, Shuji AZUMO | 2022-08-16 |
| 10811264 | Film-forming method and film-forming apparatus | Miyako Kaneko, Naotaka Noro | 2020-10-20 |