Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12202233 | Laminates and liquid packaging bags | Sumiaki FUJII, Masao Suzuki, Keiko SEKIYA | 2025-01-21 |
| 11664266 | Substrate processing apparatus and substrate delivery method | Yuichiro WAGATSUMA, Kentaro Asakura, Masahisa Watanabe | 2023-05-30 |
| 11527404 | Substrate processing apparatus and substrate processing method | Takashi Kamio, Kazuyoshi Yamazaki, Naoshige FUSHIMI | 2022-12-13 |
| 11335542 | Plasma processing apparatus | — | 2022-05-17 |
| 11236423 | Film-forming apparatus | Takashi Kamio, Kai Shiono | 2022-02-01 |
| 9885114 | Film forming apparatus | Tomohiro OOTA, Toshio Takagi | 2018-02-06 |
| 9441293 | Film-forming apparatus | — | 2016-09-13 |
| 7369338 | Servo writer, and write and inspection method of servo signal | — | 2008-05-06 |