Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11981992 | Method for forming RuSi film and substrate processing system | Tadahiro Ishizaka | 2024-05-14 |
| 11721557 | Etching method | Tadashi MITSUNARI, Tsuyoshi Moriya | 2023-08-08 |
| 11450512 | Plasma processing method | Shinya Iwashita, Takamichi Kikuchi, Toshio Hasegawa, Tsuyoshi Moriya | 2022-09-20 |
| 11377739 | Film forming apparatus | — | 2022-07-05 |
| 11081322 | Film forming apparatus, cleaning method for film forming apparatus and recording medium | Toshio Hasegawa, Tamaki Takeyama, Shinya Iwashita, Katsuhito Hirose | 2021-08-03 |
| 10872764 | Film forming method | Shinya Iwashita, Takamichi Kikuchi, Toshio Hasegawa, Tsuyoshi Moriya | 2020-12-22 |
| 10811264 | Film-forming method and film-forming apparatus | Yuichiro WAGATSUMA, Miyako Kaneko | 2020-10-20 |
| 10535528 | Method of forming titanium oxide film and method of forming hard mask | Naoki Shindo, Toshio Hasegawa, Miyako Kaneko | 2020-01-14 |
| 10519548 | Film forming apparatus | — | 2019-12-31 |
| 10392698 | Film forming method, film forming system and surface processing method | Miyako Kaneko, Tsuyoshi Takahashi, Kazuyoshi Yamazaki | 2019-08-27 |
| 8808452 | Silicon film formation apparatus and method for using same | Takahiro Miyahara | 2014-08-19 |
| 7938080 | Method for using film formation apparatus | Yamato Tonegawa, Takehiko Fujita, Norifumi Kimura | 2011-05-10 |
| 7727296 | Collecting unit for semiconductor process | Yukio Tojo, Yoshiyuki Fujita, Yuji Ito | 2010-06-01 |
| 7494943 | Method for using film formation apparatus | Yamato Tonegawa, Takehiko Fujita, Norifumi Kimura | 2009-02-24 |