Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362143 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Shinya Iwashita, Yusuke Suzuki | 2025-07-15 |
| 12312683 | Substrate processing method and substrate processing device | Munehito KAGAYA, Hiroyuki Onoda | 2025-05-27 |
| 11721557 | Etching method | Naotaka Noro, Tsuyoshi Moriya | 2023-08-08 |
| 11658008 | Film forming apparatus and film forming method | Munehito KAGAYA, Yusuke Suzuki, Shinya Iwashita | 2023-05-23 |
| 11035741 | Temperature measurement substrate and temperature measurement system | Satoshi Tanaka, Tsuyoshi Moriya, Toshiya Matsuda, Masaaki Miyagawa, Kenya Iwasaki | 2021-06-15 |
| 10643839 | Film forming apparatus and film forming method | Ayuta Suzuki, Kosuke Yamamoto, Kazuyoshi Matsuzaki, Munehito KAGAYA, Tsuyoshi Moriya +1 more | 2020-05-05 |