Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841278 | Temperature measurement sensor, temperature measurement system, and temperature measurement method | Tong Wu, Tomohide Minami | 2023-12-12 |
| 11035741 | Temperature measurement substrate and temperature measurement system | Tadashi MITSUNARI, Satoshi Tanaka, Tsuyoshi Moriya, Toshiya Matsuda, Kenya Iwasaki | 2021-06-15 |
| 10290476 | Plasma processing method and plasma processing apparatus | Yusuke Hirayama | 2019-05-14 |
| 10068778 | Plasma processing method and plasma processing apparatus | Yusuke Hirayama | 2018-09-04 |
| 9966291 | De-chuck control method and plasma processing apparatus | Junichi Sasaki | 2018-05-08 |
| D709536 | Focusing ring | Akihiro Yoshimura, Tetsuji Sato | 2014-07-22 |
| 8702903 | Thermally conductive sheet and substrate mounting device including same | Akihiro Yoshimura | 2014-04-22 |
| 8524005 | Heat-transfer structure and substrate processing apparatus | Tetsuji Sato | 2013-09-03 |
| 8043472 | Substrate processing apparatus and focus ring | Eiichi Nishimura | 2011-10-25 |
| 7658816 | Focus ring and plasma processing apparatus | Akira Koshiishi, Hideaki Tanaka, Nobuyuki Okayama, Shunsuke Mizukami, Wataru Shimizu +5 more | 2010-02-09 |
| 7655579 | Method for improving heat transfer of a focus ring to a target substrate mounting device | Akihiro Yoshimura | 2010-02-02 |