Issued Patents All Time
Showing 1–25 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359308 | Film forming method and semiconductor production apparatus | Yusuke Suzuki, Kazuhide Hasebe, Atsushi Endo, Satoshi Tanaka | 2025-07-15 |
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tadahiro Ishizaka, Yoshinori Morisada | 2024-08-13 |
| 12027344 | Film forming apparatus | Shinya Iwashita, Ayuta Suzuki, Takahiro SHINDO, Kazuki DEMPOH, Tatsuo Matsudo +2 more | 2024-07-02 |
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tatsuo Matsudo, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Makoto Sekine, Hirotsugu Sugiura, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |
| 11776105 | Contaminant detection system, contaminant detecting method, and semiconductor manufacturing apparatus | Yoshitaka Enoki, Tokio Toyama, Michihiro Takahashi, Takuya Mori | 2023-10-03 |
| 11721557 | Etching method | Tadashi MITSUNARI, Naotaka Noro | 2023-08-08 |
| 11457189 | Device for and method of correcting white balance of image | — | 2022-09-27 |
| 11450512 | Plasma processing method | Shinya Iwashita, Takamichi Kikuchi, Naotaka Noro, Toshio Hasegawa | 2022-09-20 |
| 11035741 | Temperature measurement substrate and temperature measurement system | Tadashi MITSUNARI, Satoshi Tanaka, Toshiya Matsuda, Masaaki Miyagawa, Kenya Iwasaki | 2021-06-15 |
| 10872764 | Film forming method | Shinya Iwashita, Takamichi Kikuchi, Naotaka Noro, Toshio Hasegawa | 2020-12-22 |
| 10805526 | Imaging apparatus, imaging method, and computer program product | — | 2020-10-13 |
| 10771754 | Image white balance correction method and electronic device | — | 2020-09-08 |
| 10643839 | Film forming apparatus and film forming method | Ayuta Suzuki, Kosuke Yamamoto, Kazuyoshi Matsuzaki, Munehito KAGAYA, Tadashi MITSUNARI +1 more | 2020-05-05 |
| 10491875 | Image processing apparatus and image processing method | — | 2019-11-26 |
| 10121680 | Substrate processing apparatus | Munehito KAGAYA, Ayuta Suzuki, Kosuke Yamamoto, Kazuyoshi Matsuzaki | 2018-11-06 |
| 9661290 | Image processing apparatus and method | — | 2017-05-23 |
| 9627184 | Cleaning method of processing apparatus, program for performing the method, and storage medium for storing the program | Hiroyuki Nakayama, Hiroshi Nagaike | 2017-04-18 |
| 9441292 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Songyun Kang, Nobutoshi TERASAWA, Yoshiaki Okabe | 2016-09-13 |
| 9209010 | Substrate cleaning method and substrate cleaning device | Hidefumi Matsui, Masaki Narushima | 2015-12-08 |
| 9022225 | Filtration filter and production method therefor | Asao Yamashita | 2015-05-05 |
| 8945413 | Etching method, etching apparatus, and ring member | Ayuta Suzuki, Songyun Kang, Nobutoshi TERASAWA, Yoshiaki Okabe | 2015-02-03 |
| 8945313 | Vacuum exhaust method and a substrate processing apparatus therefor | Hidefumi Matsui, Nobuyuki Nagayama | 2015-02-03 |
| 8894355 | Turbomolecular pump, and particle trap for turbomolecular pump | Yukiteru Sekita, Kazuma Kubota, Eiichi Sugawara | 2014-11-25 |
| 8877002 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Nobuyuki Nagayama, Hiroshi Nagaike | 2014-11-04 |