Issued Patents All Time
Showing 26–50 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8854625 | Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring | Hiroyuki Nakayama | 2014-10-07 |
| 8845853 | Substrate processing apparatus and substrate processing method | Jun Yamawaku | 2014-09-30 |
| 8821607 | Particle capture unit, method for manufacturing the same, and substrate processing apparatus | Syunsuke Toyoizumi, Katsuyuki Takahiro | 2014-09-02 |
| 8751196 | Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus | Yasutoshi Umehara, Yuki KATAOKA, Michiko Nakaya | 2014-06-10 |
| 8727708 | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | Takahiro Murakami, Yoshiyuki Kobayashi, Tetsuji Sato, Eiichi Sugawara, Shosuke Endoh +1 more | 2014-05-20 |
| 8608422 | Particle sticking prevention apparatus and plasma processing apparatus | Hiroshi Nagaike, Teruyuki Hayashi, Kaoru Fujihara | 2013-12-17 |
| 8585831 | Substrate cleaning method | Hidefumi Matsui, Eiichi Nishimura, Shinichi Kawaguchi, Jun Yamawaku, Kunio Miyauchi | 2013-11-19 |
| 8578952 | Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for implementing the method | Hiroshi Nagaike | 2013-11-12 |
| 8516715 | Evacuation method and storage medium | Jun Yamawaku, Hideaki Yakushiji, Kazumasa Abe | 2013-08-27 |
| 8498911 | Particle generation factor determining system, charging method and storage medium | — | 2013-07-30 |
| 8475602 | Substrate cleaning method and apparatus | Hidefumi Matsui | 2013-07-02 |
| 8475562 | Gas purification apparatus and method | — | 2013-07-02 |
| 8449715 | Internal member of a plasma processing vessel | Kouji Mitsuhashi, Hiroyuki Nakayama, Nobuyuki Nagayama, Hiroshi Nagaike | 2013-05-28 |
| 8419963 | Polishing method | — | 2013-04-16 |
| 8404050 | Plasma processing apparatus and method | Hiroyuki Nakayama | 2013-03-26 |
| 8389053 | Method of cleaning powdery source supply system, storage medium, substrate processing system and substrate processing method | Toshio Hasegawa, Hideaki Yamasaki | 2013-03-05 |
| 8382938 | Gate valve cleaning method and substrate processing system | Hiroyuki Nakayama, Keisuke Kondoh, Hiroki Oka | 2013-02-26 |
| 8384902 | Optical gas-analysis system and a gas flow cell | Osamu Akiyama, Jun Yamawaku | 2013-02-26 |
| 8356970 | Exhaust pump, communicating pipe, and exhaust system | Eiichi Sugawara | 2013-01-22 |
| 8337629 | Method for cleaning elements in vacuum chamber and apparatus for processing substrates | Hiroshi Nagaike, Hiroyuki Nakayama | 2012-12-25 |
| 8323414 | Particle removal apparatus and method and plasma processing apparatus | Hiroshi Nagaike | 2012-12-04 |
| 8297292 | Cleaning device and cleaning method of semiconductor manufacturing apparatus | Takayuki Kokubo, Jun Yamawaku | 2012-10-30 |
| 8257498 | Substrate transfer module and substrate processing system | Jun Yamawaku | 2012-09-04 |
| 8260557 | System and method for detecting particle generation source, and storage medium therefor | — | 2012-09-04 |
| 8253930 | Absorption spectrometric apparatus for semiconductor production process | Osamu Akiyama, Masashi Akimoto, Jun Yamawaku | 2012-08-28 |