Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10192719 | Plasma processing method | Takamitsu TAKAYAMA, Akitoshi Harada | 2019-01-29 |
| 9984907 | Evacuation method and vacuum processing apparatus | Hirofumi Haga, Nobutaka Nakao | 2018-05-29 |
| 8516715 | Evacuation method and storage medium | Jun Yamawaku, Tsuyoshi Moriya, Kazumasa Abe | 2013-08-27 |
| 8243265 | Method and apparatus for detecting foreign materials and storage medium | Tsuyoshi Moriya, Hiroshi Nagaike | 2012-08-14 |