Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10276405 | Plasma processing apparatus | Akinori Miyata, Shigeru Senzaki, Hirofumi Haga | 2019-04-30 |
| 9984907 | Evacuation method and vacuum processing apparatus | Hirofumi Haga, Hideaki Yakushiji | 2018-05-29 |
| 8142609 | Plasma processing apparatus | Syuichi Takahashi, Hiroki Matsumaru, Kenji Komatsu | 2012-03-27 |