Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430636 | Plasma processing apparatus and cleaning method | — | 2022-08-30 |
| 10497545 | Plasma processing apparatus and cleaning method | — | 2019-12-03 |
| 9017786 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Ken Yoshioka, Yasuharu Sasaki | 2015-04-28 |
| 8252132 | Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device | Ken Yoshioka, Yasuharu Sasaki | 2012-08-28 |
| 8142609 | Plasma processing apparatus | Hiroki Matsumaru, Nobutaka Nakao, Kenji Komatsu | 2012-03-27 |
| D496008 | Exhaust ring for manufacturing semiconductors | Yasuharu Sasaki | 2004-09-14 |
| 6523352 | Piping support of gas turbine steam cooled combustor | Yoshiaki Nishimura, Hiroyuki Fujita, Hiroyuki Ogasawara, Noboru Yamada, Ikuo Ando +5 more | 2003-02-25 |