Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8142609 | Plasma processing apparatus | Syuichi Takahashi, Nobutaka Nakao, Kenji Komatsu | 2012-03-27 |
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Shinji Himori, Kazuya Nagaseki, Shoichiro Matsuyama, Toshiki Takahashi | 2011-04-12 |
| 7767055 | Capacitive coupling plasma processing apparatus | Shinji Himori, Noriaki Imai, Katsumi Horiguchi, Takaaki Nezu, Shoichiro Matsuyama +5 more | 2010-08-03 |
| 7585386 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Shinji Himori, Kazuya Nagaseki, Shoichiro Matsuyama, Toshiki Takahashi | 2009-09-08 |