Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7767055 | Capacitive coupling plasma processing apparatus | Shinji Himori, Noriaki Imai, Takaaki Nezu, Shoichiro Matsuyama, Hiroki Matsumaru +5 more | 2010-08-03 |
| 7678225 | Focus ring for semiconductor treatment and plasma treatment device | Takaaki Nezu, Daisuke Hayashi, Toshiya Tsukahara | 2010-03-16 |
| 7416676 | Plasma etching method and apparatus, control program for performing the etching method, and storage medium storing the control program | Jin Fujihara | 2008-08-26 |
| 7109123 | Silicon etching method | Takanori Mimura, Kazuya Nagaseki, Kenji Yamamoto, Yahui Huang | 2006-09-19 |