Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9153465 | Substrate stage, substrate processing apparatus and substrate processing system | Masaya Odagiri, Yusuke Muraki | 2015-10-06 |
| 8741065 | Substrate processing apparatus | Masaya Odagiri, Yusuke Muraki | 2014-06-03 |
| 8394720 | Plasma processing method and resist pattern modifying method | — | 2013-03-12 |
| 7416676 | Plasma etching method and apparatus, control program for performing the etching method, and storage medium storing the control program | Katsumi Horiguchi | 2008-08-26 |