Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715643 | Gas phase etch with controllable etch selectivity of metals | Subhadeep Kal, Daisuke Ito, Matthew Flaugh, Aelan Mosden | 2023-08-01 |
| 11328932 | Substrate processing method and substrate processing apparatus | — | 2022-05-10 |
| 10923356 | Gas phase etch with controllable etch selectivity of silicon-germanium alloys | Subhadeep Kal, Masashi Matsumoto, Daisuke Ito, Aelan Mosden | 2021-02-16 |
| 9911596 | Modification processing method and method of manufacturing semiconductor device | Tamotsu Morimoto, Kazuaki Nishimura | 2018-03-06 |
| 9443724 | Modification processing method and method of manufacturing semiconductor device | Tamotsu Morimoto, Kazuaki Nishimura | 2016-09-13 |
| 9362149 | Etching method, etching apparatus, and storage medium | Shigeru Kasai, Tomohiro Suzuki | 2016-06-07 |
| 9153465 | Substrate stage, substrate processing apparatus and substrate processing system | Masaya Odagiri, Jin Fujihara | 2015-10-06 |
| 9105586 | Etching of silicon oxide film | Shigeki Tozawa | 2015-08-11 |
| 8741065 | Substrate processing apparatus | Masaya Odagiri, Jin Fujihara | 2014-06-03 |
| 8353986 | Substrate processing apparatus | Yoshiaki Sasaski, Eiichi Nishimura, Yuko Ono | 2013-01-15 |
| 7897498 | Method for manufacturing semiconductor device | Glenn W. Gale, Yoshihiro Hirota, Genji Nakamura, Masato Kushibiki, Naoki Shindo +3 more | 2011-03-01 |
| 6797560 | Method of manufacturing a capacitor having tantalum oxide film as an insulating film | Keizo Hosoda | 2004-09-28 |
| 6551896 | Capacitor for analog circuit, and manufacturing method thereof | Keizo Hosoda, Atsushi Sato, Harunori Ushikawa | 2003-04-22 |
| 6355582 | Silicon nitride film formation method | Keizo Hosoda, Nobuaki Shigematsu, Atsushi Sato | 2002-03-12 |