Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466507 | Etching method, and recording medium | Tomoaki OGIWARA | 2016-10-11 |
| 9105586 | Etching of silicon oxide film | Yusuke Muraki | 2015-08-11 |
| 8991333 | Substrate processing method and system | — | 2015-03-31 |
| 8968475 | Substrate processing apparatus | Masaya Odagiri, Hajime Ugajin | 2015-03-03 |
| 8956546 | Substrate processing method and substrate processing apparatus | Hajime Ugajin | 2015-02-17 |
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Akira Kodashima, Kazuhiro Kubota, Yuki Chiba | 2011-04-12 |
| 6190495 | Magnetron plasma processing apparatus | Kazuhiro Kubota, Jun Hirose, Akira Koshiishi, Tomomi Kondo | 2001-02-20 |
| 5779803 | Plasma processing apparatus | Yoichi Kurono, Shozo Hosoda | 1998-07-14 |
| 5766498 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazushi Tomita, Shunichi Iimuro, Masashi Arasawa +1 more | 1998-06-16 |
| 5593540 | Plasma etching system and plasma etching method | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Hiromitsu Matsuo +2 more | 1997-01-14 |
| 5578164 | Plasma processing apparatus and method | Yoichi Kurono, Shozo Hosoda | 1996-11-26 |
| 5445709 | Anisotropic etching method and apparatus | Masayuki Kojima, Yoshikazu Ito, Kazuhsi Tomita, Shunichi Iimuro, Masashi Arasawa +1 more | 1995-08-29 |
| 5423936 | Plasma etching system | Kazushi Tomita, Yoshikazu Ito, Motohiro Hirano, Akira Nozawa, Hiromitsu Matsuo +2 more | 1995-06-13 |