Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436230 | Process device | Hidetoshi Kimura | 2002-08-20 |
| 6190495 | Magnetron plasma processing apparatus | Kazuhiro Kubota, Shigeki Tozawa, Jun Hirose, Akira Koshiishi | 2001-02-20 |
| 6014943 | Plasma process device | Junichi Arami, Hiroo Ono, Koji Miyata | 2000-01-18 |