Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12067961 | Musical instrument system | — | 2024-08-20 |
| 11027612 | Vehicle power supply system | Masato Sasahara, Masataka Komiyama, Yoshihito Aoki, Takaaki Izawa | 2021-06-08 |
| 10886097 | Plasma processing apparatus and plasma processing method | Masanobu Honda | 2021-01-05 |
| 10156916 | Input device identification method, input device identification apparatus, and input system | Hiroshi Kirita | 2018-12-18 |
| 9887109 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Masanobu Honda | 2018-02-06 |
| 9881806 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Masanobu Honda, Hironobu Ichikawa | 2018-01-30 |
| 9460893 | Substrate processing apparatus | Masaya Kawamata, Masanobu Honda | 2016-10-04 |
| 9396968 | Etching method and etching apparatus | — | 2016-07-19 |
| 9390935 | Etching method | Maju TOMURA, Hikaru Watanabe, Fumiya Kobayashi, Masanobu Honda | 2016-07-12 |
| 9385498 | Crimp machine and crimp system | Shuuji Satake, Akiyoshi Kanazawa, Ken Ito, Yoshimitsu Maejima, Kazuya Tsubaki | 2016-07-05 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Masanobu Honda | 2016-05-24 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Masanobu Honda, Takayuki Katsunuma | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Masanobu Honda, Hironobu Ichikawa | 2016-04-19 |
| 9279184 | Method of forming a pattern and substrate processing system | Ryukichi Shimizu | 2016-03-08 |
| 9257301 | Method of etching silicon oxide film | Masahiro Ogasawara, Masafumi Urakawa, Yoshinobu Hayakawa, Hikaru Watanabe | 2016-02-09 |
| 9048178 | Plasma etching method and semiconductor device manufacturing method | Masanobu Honda, Takayuki Katsunuma | 2015-06-02 |
| 8790489 | Substrate processing apparatus and substrate processing method | Masanobu Honda, Yoshinobu Ooya, Masaru Nishino | 2014-07-29 |
| 8187981 | Substrate processing method, substrate processing system, and computer-readable storage medium | Kazuhiro Tomioka, Nobuyoshi Kobayashi, Isamu Sakuragi | 2012-05-29 |
| 8075730 | Apparatus for manufacturing a semiconductor device | Satoru Shimura, Ryuichi Asako, Seiichi Takayama | 2011-12-13 |
| 8048687 | Processing method for recovering a damaged low-k film of a substrate and storage medium | Wataru Shimizu, Daisuke Hayashi | 2011-11-01 |
| 8021564 | Method for detecting an end point of resist peeling, method and apparatus for peeling resist, and computer-readable storage medium | Isamu Sakuragi | 2011-09-20 |
| 7922865 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator | Koji Miyata, Jun Hirose, Akira Kodashima, Shigeki Tozawa, Yuki Chiba | 2011-04-12 |
| 7902806 | Load control unit | Hiroo Yabe, Kazuya Tsubaki, Masato Sasahara | 2011-03-08 |
| 7799703 | Processing method and storage medium | Naotsugu Hoshi, Yuki Chiba, Ryuichi Asako | 2010-09-21 |
| 7768759 | Control circuit of semiconductor device having over-heat protecting function | Hiroo Yabe, Masato Sasahara | 2010-08-03 |