Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251052 | Plasma processing method and plasma processing apparatus | Tetsuya Ohishi, Shinji Higashitsutsumi | 2022-02-15 |
| 10316835 | Method of determining output flow rate of gas output by flow rate controller of substrate processing apparatus | Jun Yamashima, Shinichiro Hayasaka, Toshihiro TSURUTA, Hiroshi Fujii, Junichi Akiba +1 more | 2019-06-11 |
| 9384999 | Plasma etching method and storage medium | Noriyuki Kobayashi | 2016-07-05 |
| 9130018 | Plasma etching method and storage medium | Noriyuki Kobayashi | 2015-09-08 |
| 8404596 | Plasma ashing method | Shigeru Tahara | 2013-03-26 |
| 8252694 | Plasma etching method and storage medium | Noriyuki Kobayashi | 2012-08-28 |
| 7964511 | Plasma ashing method | Shigeru Tahara | 2011-06-21 |
| 7799703 | Processing method and storage medium | Kazuhiro Kubota, Yuki Chiba, Ryuichi Asako | 2010-09-21 |