Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11251052 | Plasma processing method and plasma processing apparatus | Naotsugu Hoshi, Tetsuya Ohishi | 2022-02-15 |
| 9570312 | Plasma etching method | Ryohei TAKEDA, Mitsuhiro Tomura, Akinori Kitamura, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |