Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12051570 | Plasma processing apparatus | Maju TOMURA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2024-07-30 |
| 10381237 | Etching method | Sho Tominaga, Yoshinobu Ooya | 2019-08-13 |
| 9997374 | Etching method | Sho Tominaga, Yoshinobu Ooya | 2018-06-12 |
| 9922806 | Etching method and plasma processing apparatus | Maju TOMURA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2018-03-20 |
| 9659789 | Etching method and etching apparatus | Ryuichi TAKASHIMA, Yoshinobu Ooya | 2017-05-23 |
| 9570312 | Plasma etching method | Mitsuhiro Tomura, Akinori Kitamura, Shinji Higashitsutsumi, Hiroto Ohtake, Takashi Tsukamoto | 2017-02-14 |