Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404281 | Method of etching silicon containing films selectively against each other | Taku Gohira | 2022-08-02 |
| 10903084 | Method of etching silicon containing films selectively against each other | Taku Gohira | 2021-01-26 |
| 10707090 | Plasma etching method | Wataru TAKAYAMA, Yoshiki Igarashi | 2020-07-07 |
| 10381237 | Etching method | Ryohei TAKEDA, Yoshinobu Ooya | 2019-08-13 |
| 10304691 | Method of etching silicon oxide and silicon nitride selectively against each other | Taku Gohira | 2019-05-28 |
| 9997374 | Etching method | Ryohei TAKEDA, Yoshinobu Ooya | 2018-06-12 |
| 9966273 | Plasma etching method | Wataru TAKAYAMA, Yoshiki Igarashi | 2018-05-08 |
| 9779961 | Etching method | Yusuke Saitoh, Yu Nagatomo, Hayato Hishinuma, Wataru TAKAYAMA, Yuki Kaneko | 2017-10-03 |
| 9666446 | Etching method | Wataru TAKAYAMA, Yoshiki Igarashi | 2017-05-30 |