Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867777 | Plasma processing method and plasma processing apparatus | Muneyuki Omi, Rei Ibuka, Dai Igarashi, Takayuki Suzuki, Takahiro Murakami | 2020-12-15 |
| 10707090 | Plasma etching method | Sho Tominaga, Yoshiki Igarashi | 2020-07-07 |
| 10692729 | Etching process method | Jin Kudo, Maju TOMURA | 2020-06-23 |
| 9966273 | Plasma etching method | Sho Tominaga, Yoshiki Igarashi | 2018-05-08 |
| 9779961 | Etching method | Yusuke Saitoh, Yu Nagatomo, Hayato Hishinuma, Sho Tominaga, Yuki Kaneko | 2017-10-03 |
| 9666446 | Etching method | Sho Tominaga, Yoshiki Igarashi | 2017-05-30 |
| 9230824 | Method of manufacturing semiconductor device | Shoichiro Matsuyama, Susumu Nogami, Daisuke Tamura, Kyosuke Hayashi, Jun Kawanobe | 2016-01-05 |