Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10438774 | Etching method and plasma processing apparatus | Hisashi Hirose | 2019-10-08 |
| 9779961 | Etching method | Yusuke Saitoh, Yu Nagatomo, Wataru TAKAYAMA, Sho Tominaga, Yuki Kaneko | 2017-10-03 |