Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342167 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Taku Gohira | 2022-05-24 |
| 10714320 | Plasma processing method including cleaning of inside of chamber main body of plasma processing apparatus | Taku Gohira | 2020-07-14 |
| 10692729 | Etching process method | Wataru TAKAYAMA, Maju TOMURA | 2020-06-23 |
| 10600654 | Etching process method | Maju TOMURA, Yoshinobu Ohya | 2020-03-24 |
| 10361070 | Method of processing target object | Taku Gohira | 2019-07-23 |
| 9147580 | Plasma etching method and plasma processing apparatus | Takayuki Katsunuma, Masanobu Honda, Hironobu Ichikawa | 2015-09-29 |