Issued Patents All Time
Showing 1–25 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412750 | Plasma processing method and plasma processing apparatus | Shinya Ishikawa, Kenta ONO | 2025-09-09 |
| 12334343 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara | 2025-06-17 |
| 12230505 | Etching apparatus | Akihiro Tsuji, Hikaru Watanabe | 2025-02-18 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Yoshihide Kihara | 2024-08-27 |
| 11955337 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara | 2024-04-09 |
| 11922307 | Learning device, inference device, and learned model | Kosuke NAKAGO, Daisuke MOTOKI, Masaki Watanabe, Tomoki Komatsu, Hironori MOKI +2 more | 2024-03-05 |
| 11728176 | Treatment method | Kiyohito Ito, Shinya Morikita, Kensuke Taniguchi, Michiko Nakaya | 2023-08-15 |
| 11699614 | Film deposition method and plasma processing apparatus | Michiko Nakaya | 2023-07-11 |
| 11651971 | Etching method, substrate processing apparatus, and substrate processing system | Kenta ONO, Shinya Ishikawa | 2023-05-16 |
| 11594422 | Film etching method for etching film | Takayuki Hoshi, Masahiro Tabata, Toru Hisamatsu | 2023-02-28 |
| 11545355 | Substrate processing method and substrate processing apparatus | Kae KUMAGAI, Toru Hisamatsu | 2023-01-03 |
| 11495468 | Etching method and etching apparatus | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara | 2022-11-08 |
| 11495469 | Method for processing substrates | Toru Hisamatsu, Yoshihide Kihara | 2022-11-08 |
| 11488836 | Apparatus for substrate processing | Masahiro Tabata, Toru Hisamatsu, Sho Kumakura, Ryuichi Asako, Shinya Ishikawa | 2022-11-01 |
| 11476123 | Etching method, plasma processing apparatus, and substrate processing system | Takayuki Katsunuma, Yuta NAKANE, Shinya Ishikawa | 2022-10-18 |
| 11459655 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Yoshihide Kihara | 2022-10-04 |
| 11355350 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Kenta ONO, Maju TOMURA | 2022-06-07 |
| 11328933 | Etching method, substrate processing apparatus, and substrate processing system | Shinya Ishikawa, Kenta ONO | 2022-05-10 |
| 11270889 | Etching method and etching apparatus | Maju TOMURA, Yoshihide Kihara | 2022-03-08 |
| 11264236 | Substrate processing method | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara | 2022-03-01 |
| 11127598 | Film etching method for etching film | Takayuki Hoshi, Masahiro Tabata, Toru Hisamatsu | 2021-09-21 |
| 11114304 | Substrate processing method | Takayuki Katsunuma, Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Maju TOMURA +1 more | 2021-09-07 |
| 11101138 | Etching method | Maju TOMURA, Yoshihide Kihara | 2021-08-24 |
| 11081360 | Method for processing workpiece | Masahiro Tabata, Toru Hisamatsu, Yoshihide Kihara | 2021-08-03 |