Issued Patents All Time
Showing 51–75 of 112 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9460893 | Substrate processing apparatus | Masaya Kawamata, Kazuhiro Kubota | 2016-10-04 |
| 9396962 | Etching method | Keiji Kitagaito, Takayuki Katsunuma | 2016-07-19 |
| 9390935 | Etching method | Maju TOMURA, Hikaru Watanabe, Fumiya Kobayashi, Kazuhiro Kubota | 2016-07-12 |
| 9362090 | Plasma processing apparatus, plasma processing method, and storage medium | Yutaka Matsui, Manabu Sato | 2016-06-07 |
| 9349619 | Plasma etching method and plasma etching apparatus | Masaya Kawamata, Kazuhiro Kubota | 2016-05-24 |
| 9330973 | Workpiece processing method | Hikaru Watanabe, Akihiro Tsuji | 2016-05-03 |
| 9330935 | Plasma etching method and plasma etching apparatus | Toru Hisamatsu, Yoshihide Kihara | 2016-05-03 |
| 9330930 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Takayuki Katsunuma | 2016-05-03 |
| 9318340 | Method of manufacturing a semiconductor device | Takayuki Katsunuma, Kazuhiro Kubota, Hironobu Ichikawa | 2016-04-19 |
| 9299579 | Etching method and plasma processing apparatus | Maju TOMURA, Hikaru Watanabe, Takahiko Kato | 2016-03-29 |
| 9202707 | Semiconductor device manufacturing method | Masaya Kawamata | 2015-12-01 |
| 9147580 | Plasma etching method and plasma processing apparatus | Takayuki Katsunuma, Hironobu Ichikawa, Jin Kudo | 2015-09-29 |
| 9087676 | Plasma processing method and plasma processing apparatus | Takayuki Katsunuma, Hironobu Ichikawa | 2015-07-21 |
| 9048178 | Plasma etching method and semiconductor device manufacturing method | Kazuhiro Kubota, Takayuki Katsunuma | 2015-06-02 |
| 8999068 | Chamber cleaning method | Hidetoshi Hanaoka, Taichi Hirano, Takanori Mimura, Manabu Iwata, Taketoshi Okajo | 2015-04-07 |
| 8840753 | Plasma etching unit | Kazuya Nagaseki, Koichiro Inazawa, Shoichiro Matsuyama, Hisataka Hayashi | 2014-09-23 |
| 8790489 | Substrate processing apparatus and substrate processing method | Kazuhiro Kubota, Yoshinobu Ooya, Masaru Nishino | 2014-07-29 |
| 8671882 | Plasma processing apparatus | — | 2014-03-18 |
| 8647442 | Cleaning substrate and cleaning method | Yohei Yamazawa, Hiroshi Nagaike, Masashi Saito | 2014-02-11 |
| 8642483 | Substrate processing with shrink etching step | — | 2014-02-04 |
| 8557706 | Substrate processing method | Hironobu Ichikawa | 2013-10-15 |
| 8545671 | Plasma processing method and plasma processing apparatus | — | 2013-10-01 |
| 8524331 | Substrate processing method | — | 2013-09-03 |
| 8440050 | Plasma processing apparatus and method, and storage medium | Manabu Iwata, Hiroyuki Nakayama, Kenji Masuzawa | 2013-05-14 |
| 8440572 | Si etching method | — | 2013-05-14 |