Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12224164 | Radio frequency (RF) system with embedded RF signal pickups | Chelsea DuBose, Barton Lane, Merritt Funk, Justin Moses | 2025-02-11 |
| 12176183 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Justin Moses, Chelsea DuBose, Michael Hummel | 2024-12-24 |
| 11990318 | Filter circuit | — | 2024-05-21 |
| 11832373 | Plasma processing apparatus | Takehisa Saito, Mayo UDA, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2023-11-28 |
| 11817296 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-11-14 |
| 11600474 | RF voltage and current (V-I) sensors and measurement methods | Barton Lane, Merritt Funk, Justin Moses, Chelsea DuBose, Michael Hummel | 2023-03-07 |
| 11470712 | Plasma processing apparatus | Takehisa Saito, Mayo UDA, Keigo Toyoda, Alok Ranjan, Toshiki Nakajima | 2022-10-11 |
| 11410832 | RF measurement system and method | Merritt Funk, Chelsea DuBose, Barton Lane | 2022-08-09 |
| 11037762 | Plasma processing apparatus | Naohiko Okunishi, Hironobu Misawa, Hidehito Soeta | 2021-06-15 |
| 10916410 | Plasma processing apparatus | Atsuki Furuya | 2021-02-09 |
| 10854431 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-12-01 |
| 10804076 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Kazuki Denpoh, Jun Yamawaku, Masashi Saito | 2020-10-13 |
| 10679867 | Plasma processing apparatus | — | 2020-06-09 |
| 10593517 | Plasma processing apparatus | — | 2020-03-17 |
| 10546727 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +11 more | 2020-01-28 |
| 10529539 | Plasma processing apparatus and method | Akira Koshiishi, Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu +10 more | 2020-01-07 |
| 10381197 | Transformer, plasma processing apparatus, and plasma processing method | — | 2019-08-13 |
| 10020167 | Plasma processing apparatus | — | 2018-07-10 |
| 9997332 | Plasma processing apparatus and plasma processing method | Masashi Saito, Kazuki Denpoh, Chishio Koshimizu, Jun Yamawaku | 2018-06-12 |
| 9953811 | Plasma processing method | — | 2018-04-24 |
| 9941097 | Plasma processing apparatus | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Chishio Koshimizu, Masashi Saito, Kazuki Denpoh, Jun Yamawaku | 2018-02-20 |
| 9627181 | Plasma processing apparatus | — | 2017-04-18 |
| 9583312 | Film formation device, substrate processing device, and film formation method | Jun Yamawaku, Chishio Koshimizu, Mitsuhiro Tachibana, Hitoshi Kato, Takeshi Kobayashi +2 more | 2017-02-28 |
| 9502215 | Plasma processing apparatus and plasma processing method | Hitoshi Kato, Shigehiro Miura, Chishio Koshimizu, Jun Yamawaku | 2016-11-22 |