Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804076 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Jun Yamawaku, Masashi Saito | 2020-10-13 |
| 9997332 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Chishio Koshimizu, Jun Yamawaku | 2018-06-12 |
| 9941097 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku | 2018-04-10 |
| 9899191 | Plasma processing apparatus | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku | 2018-02-20 |
| 9455133 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Peter L. G. Ventzek, Lin Xu, Lee Chen | 2016-09-27 |
| 9313872 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Jun Yamawaku, Masashi Saito | 2016-04-12 |
| 9253867 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Masashi Saito, Chishio Koshimizu, Jun Yamawaku | 2016-02-02 |
| 9136097 | Shower plate and substrate processing apparatus | Chishio Koshimizu, Hiromasa Mochiki | 2015-09-15 |
| 8829387 | Plasma processing apparatus having hollow electrode on periphery and plasma control method | Chishio Koshimizu | 2014-09-09 |
| 8741097 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku | 2014-06-03 |
| 8608903 | Plasma processing apparatus and plasma processing method | Yohei Yamazawa, Chishio Koshimizu, Masashi Saito, Jun Yamawaku, Hachishiro Iizuka | 2013-12-17 |
| 8409459 | Hollow cathode device and method for using the device to control the uniformity of a plasma process | Peter L. G. Ventzek, Lin Xu, Lee Chen | 2013-04-02 |
| 8124539 | Plasma processing apparatus, focus ring, and susceptor | Shosuke Endoh, Noriyuki Iwabuchi, Shigeaki Kato, Tomoya Okubo, Jun Hirose +2 more | 2012-02-28 |
| 7847247 | Method of plasma particle simulation, storage medium, plasma particle simulator and plasma processing apparatus | — | 2010-12-07 |
| 7713431 | Plasma processing method | Tomoaki Ukei, Kimihiro Higuchi, Tatsuo Matsudo | 2010-05-11 |
| 7691226 | Electron temperature measurement method, electron temperature measurement program for implementing the method, and storage medium storing the electron temperature measurement program | — | 2010-04-06 |
| 6828243 | Apparatus and method for plasma treatment | — | 2004-12-07 |
| 6514347 | Apparatus and method for plasma treatment | — | 2003-02-04 |
| 5853803 | Resist processing method and apparatus | Kiyohisa Tateyama, Kimio Motoda, Tatsuya Iwasaki, Takenobu Matsuo, Eiji Yamaguchi | 1998-12-29 |
| 5718763 | Resist processing apparatus for a rectangular substrate | Kiyohisa Tateyama, Kimio Motoda, Tatsuya Iwasaki, Takenobu Matsuo, Eiji Yamaguchi | 1998-02-17 |