Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482431 | Substrate processing apparatus and substrate processing method | Norifumi Kohama, Norio Wada, Yosuke Omori, Kenji Sugakawa | 2022-10-25 |
| 10964563 | Bonding apparatus and bonding method | Norio Wada, Norifumi Kohama | 2021-03-30 |
| 9238245 | Coating apparatus and method for filling coating liquid | Takayuki Ishii, Takashi Terada, Atsushi Yamashita, Shigeto Tsuruta | 2016-01-19 |
| 7905195 | Floating-type substrate conveying and processing apparatus | Tsuyoshi Yamasaki, Toshifumi Inamasu, Kenya Shinozaki | 2011-03-15 |
| 6749688 | Coating method and apparatus for semiconductor process | Kiyohisa Tateyama, Noriyuki Anai | 2004-06-15 |
| 6514343 | Coating apparatus | — | 2003-02-04 |
| 6398879 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +1 more | 2002-06-04 |
| 6168665 | Substrate processing apparatus | Mitsuhiro Sakai, Kiyohisa Tateyama | 2001-01-02 |
| 6159288 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +3 more | 2000-12-12 |
| 6058544 | Scrubbing apparatus and scrubbing method | Yoshiharu Ota, Norio Uchihira, Kiyohisa Tateyama | 2000-05-09 |
| 6013317 | Coating apparatus and method therefor | Kiyohisa Tateyama | 2000-01-11 |
| 6010570 | Apparatus for forming coating film for semiconductor processing | Tetsu Kawasaki | 2000-01-04 |
| 5919520 | Coating method and apparatus for semiconductor process | Kiyohisa Tateyama, Noriyuki Anai | 1999-07-06 |
| 5906860 | Apparatus for treating a substrate with resist and resist-treating method | Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Tetsu Kawasaki | 1999-05-25 |
| 5853803 | Resist processing method and apparatus | Kiyohisa Tateyama, Tatsuya Iwasaki, Takenobu Matsuo, Kazuki Denpoh, Eiji Yamaguchi | 1998-12-29 |
| 5853812 | Method and apparatus for processing substrates | Tetsu Kawasaki | 1998-12-29 |
| 5803970 | Method of forming a coating film and coating apparatus | Kiyohisa Tateyama, Kenji Sekiguchi, Tsutae Omori | 1998-09-08 |
| 5762708 | Coating apparatus therefor | Kiyohisa Tateyama | 1998-06-09 |
| 5718763 | Resist processing apparatus for a rectangular substrate | Kiyohisa Tateyama, Tatsuya Iwasaki, Takenobu Matsuo, Kazuki Denpoh, Eiji Yamaguchi | 1998-02-17 |
| 5695817 | Method of forming a coating film | Kiyohisa Tateyama, Kenji Sekiguchi, Tsutae Omori | 1997-12-09 |
| 5688322 | Apparatus for coating resist on substrate | Kiyohisa Tateyama, Noriyuki Anai | 1997-11-18 |