Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770149 | Method and apparatus for cleaning treatment | Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi | 2004-08-03 |
| 6398879 | Method and apparatus for cleaning treatment | Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +1 more | 2002-06-04 |
| 6391110 | Method and apparatus for cleaning treatment | Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Tetsuya Sada +1 more | 2002-05-21 |
| 6261378 | Substrate cleaning unit and cleaning method | Hiroshi Hashimoto, Yoshitaka Matsuda, Norio Uchihira, Masaaki Yoshida | 2001-07-17 |
| 6198481 | Remote control transmission apparatus | Sadao Urano | 2001-03-06 |
| 6159288 | Method and apparatus for cleaning treatment | Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi, Kimio Motoda +3 more | 2000-12-12 |
| 5945161 | Apparatus and method for supplying process solution to surface of substrate to be processed | Hiroshi Hashimoto, Kiyohisa Tateyama, Kiyomitsu Yamaguchi, Yoshitaka Matsuda, Norio Uchihira +1 more | 1999-08-31 |