Issued Patents All Time
Showing 1–25 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7182531 | Developing method and apparatus | Masafumi Nomura, Taketora Shinogi | 2007-02-27 |
| 7101646 | Developing method and apparatus | Masafumi Nomura, Taketora Shinogi | 2006-09-05 |
| 6969572 | Developing method and apparatus | Masafumi Nomura, Taketora Shinogi | 2005-11-29 |
| 6962477 | Apparatus for and method of transferring substrates | Hideyuki Takamori | 2005-11-08 |
| 6889764 | Cooling device and cooling method | Tetsuya Sada, Osamu Hirose | 2005-05-10 |
| 6837672 | Apparatus for and method of transferring substrates | Hideyuki Takamori | 2005-01-04 |
| 6799910 | Processing method and processing apparatus | — | 2004-10-05 |
| 6749688 | Coating method and apparatus for semiconductor process | Kimio Motoda, Noriyuki Anai | 2004-06-15 |
| 6706322 | Film forming apparatus and film forming method | Tsutae Omori | 2004-03-16 |
| 6635113 | Coating apparatus and coating method | Hideyuki Takamori, Noriyuki Anai, Masafumi Nomura, Tsutae Omori | 2003-10-21 |
| 6451515 | Substrate treating method | Hideyuki Takamori, Kengo Mizosaki, Noriyuki Anai, Yoshitaka Matsuda | 2002-09-17 |
| 6443641 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2002-09-03 |
| 6391110 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +1 more | 2002-05-21 |
| 6361600 | Film forming apparatus and film forming method | Tsutae Omori | 2002-03-26 |
| 6299938 | Apparatus and method of applying resist | — | 2001-10-09 |
| 6261007 | Substrate process method and substrate process apparatus | Hideyuki Takamori, Kengo Mizosaki, Noriyuki Anai, Mitsuhiro Sakai, Shinobu Tanaka +2 more | 2001-07-17 |
| 6227786 | Substrate treating apparatus | — | 2001-05-08 |
| 6216475 | Cooling device and cooling method | Tetsuya Sada, Osamu Hirose | 2001-04-17 |
| 6207231 | Coating film forming method and coating apparatus | — | 2001-03-27 |
| 6193807 | Substrate conveying device and substrate conveying method | Tatsuya Iwasaki | 2001-02-27 |
| 6187132 | Substrate treatment device and substrate transporting method | Tatsuya Iwasaki | 2001-02-13 |
| 6168665 | Substrate processing apparatus | Mitsuhiro Sakai, Kimio Motoda | 2001-01-02 |
| 6159288 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +3 more | 2000-12-12 |
| 6152677 | Apparatus for and method of transferring substrates | Hideyuki Takamori | 2000-11-28 |
| 6126725 | Deaerating apparatus and treatment apparatus with gas permeable films | — | 2000-10-03 |