Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11667811 | Coating composition excellent in abrasion resistance | Yoshimasa HIKOBE | 2023-06-06 |
| 6451515 | Substrate treating method | Hideyuki Takamori, Kiyohisa Tateyama, Kengo Mizosaki, Noriyuki Anai | 2002-09-17 |
| 6398879 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +1 more | 2002-06-04 |
| 6261378 | Substrate cleaning unit and cleaning method | Hiroshi Hashimoto, Norio Uchihira, Masaaki Yoshida, Fumio Satou | 2001-07-17 |
| 6159288 | Method and apparatus for cleaning treatment | Fumio Satou, Mitsuhiro Sakai, Takeshi Tsukamoto, Yoichi Honda, Kiyomitsu Yamaguchi +3 more | 2000-12-12 |
| 5945161 | Apparatus and method for supplying process solution to surface of substrate to be processed | Hiroshi Hashimoto, Kiyohisa Tateyama, Kiyomitsu Yamaguchi, Norio Uchihira, Mitsuhiro Sakai +1 more | 1999-08-31 |
| 5906860 | Apparatus for treating a substrate with resist and resist-treating method | Kimio Motoda, Kiyomitsu Yamaguchi, Tetsu Kawasaki | 1999-05-25 |
| 5395003 | Covered airtight container | — | 1995-03-07 |